000 00520nam a2200169Ia 4500
008 210716s2010 xx 000 0 und d
020 _a9788122428339
041 _aeng
082 _a620.106 MOTM
100 _aMotamedi, Manouchehr E.
245 _aMOEMS: micro- opto- electro- mechanical systems.
_bMicro- opto- electro- mechanical systems.
250 _a1
260 _aNew Delhi
_bNew Age International Pvt Ltd
_c2010
300 _axx,614
650 _aMechanical Engg(621.8)
700 _aMotamedi, Manouchehr E.
999 _c197396
_d197396