| 000 | 00451nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 210716s2002 xx 000 0 und d | ||
| 020 | _a007048709X | ||
| 041 | _aeng | ||
| 082 | _a621.381 HSUT | ||
| 100 | _aHsu, Tai Ram. | ||
| 245 |
_aMems and microsystems: design and manufacture. _bDesign and manufacture. |
||
| 250 | _a1 | ||
| 260 |
_aNew Delhi _bTata McGraw Hill Publishing Company Ltd _c2002 |
||
| 300 | _axii,436 | ||
| 650 | _aDigital Systems | ||
| 999 |
_c186313 _d186313 |
||