| 000 | 00637nam a2200229Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20230503140920.0 | ||
| 008 | 210423s2012 xx 000 0 und d | ||
| 020 | _a978-0-12-524975-1 | ||
| 040 | _cAL | ||
| 041 | _aeng | ||
| 082 |
_a530.4275 _223 _bOHRM |
||
| 100 |
_aOHRING (Milton) _997078 |
||
| 245 | _aMaterials science of thin films: deposition and structure Ed 2 | ||
| 250 | _a2 | ||
| 260 |
_aSan Diego _bAcademic Press _c2012 |
||
| 300 |
_axxi,794 _bHB |
||
| 365 |
_b11373.4 _cUSD |
||
| 650 |
_aPhysics _997079 |
||
| 906 | _adeposition ; films: ; Materials ; science ; structure ; thin | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c170786 _d170786 |
||