| 000 | 00615nam a2200217Ia 4500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 005 | 20230616140001.0 | ||
| 008 | 210423s2005 xx 000 0 und d | ||
| 020 | _a978-81-8147-985-3 | ||
| 040 | _cAL | ||
| 041 | _aeng | ||
| 082 |
_a621.55 _223 _bHOFH |
||
| 100 |
_aHOFFMAN (Dorothy M);SINGH (Bawa);THIRD (John H Thomas) _996727 |
||
| 245 | _aHandbook of vacuum science and technology | ||
| 260 |
_aUSA _bAcademic Press _c2005 |
||
| 300 |
_axxii,835 _bHB |
||
| 365 |
_b3195 _cINR |
||
| 650 |
_aApplied Physics _996728 |
||
| 906 | _aHandbook ; science ; technology ; vacuum | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c170750 _d170750 |
||