000 00615nam a2200217Ia 4500
003 OSt
005 20230616140001.0
008 210423s2005 xx 000 0 und d
020 _a978-81-8147-985-3
040 _cAL
041 _aeng
082 _a621.55
_223
_bHOFH
100 _aHOFFMAN (Dorothy M);SINGH (Bawa);THIRD (John H Thomas)
_996727
245 _aHandbook of vacuum science and technology
260 _aUSA
_bAcademic Press
_c2005
300 _axxii,835
_bHB
365 _b3195
_cINR
650 _aApplied Physics
_996728
906 _aHandbook ; science ; technology ; vacuum
942 _2ddc
_cBK
999 _c170750
_d170750