000 00618nam a2200229Ia 4500
003 OSt
005 20230522094958.0
008 210423s2008 xx 000 0 und d
020 _a978-0-13-045018-0
040 _cAL
041 _aeng
082 _a621.55
_223
_bHATI
100 _aHATA (David M)
_9109932
245 _aIntroduction to vacuum technology
260 _aNew Jersey
_bPearson
_c2008
300 _avii,187
_bPB
365 _b3537
_cUSD
650 _aApplied Physics
_9109933
650 _aVacuum & Pneumatic Technologies
_9109934
906 _aIntroduction ; technology ; vacuum
942 _2ddc
_cBK
999 _c166902
_d166902