000 00637nam a2200229Ia 4500
003 OSt
005 20230508150529.0
008 210423s2010 xx 000 0 und d
020 _a9788131202791
040 _cAL
041 _aeng
082 _a530.4275 OHRM
_223
100 _aOHRING (Milton).
_999969
245 _aMaterials science of thin films: deposition and structure.
250 _a2
260 _aNew Delhi
_bAcademic Press
_c2010
300 _axxi,794
_bHB
365 _b795
_cINR
650 _aSolid State Physics
_999970
906 _adeposition ; films: ; Materials ; science ; structure. ; thin
942 _2ddc
_cBK
999 _c162479
_d162479