000 00528nam a2200205Ia 4500
003 OSt
005 20230622114526.0
008 210423s2008 xx 000 0 und d
020 _a8170237637
040 _cAL
041 _aeng
082 _a621.55 RAOV
_223
100 _aRAO (V V);others.
_999766
245 _aVacuum science and technology.
260 _aNew Delhi
_bAllied Publishers
_c2008
300 _axi,202
_bPB
365 _b225
_cINR
906 _aPhysVacuum ; science ; technology. ; Vacuum
942 _2ddc
_cBK
999 _c162395
_d162395