00663nam a2200181Ia 4500008004100000020001800041041000800059082001700067100002800084245009600112250000600208260005100214300001100265650002700276700002800303999001900331952013100350210716s2010    xx            000 0 und d  a9788122428339  aeng  a620.106 MOTM  aMotamedi, Manouchehr E.  aMOEMS: micro- opto- electro- mechanical systems.bMicro- opto- electro- mechanical systems.  a1  aNew DelhibNew Age International Pvt Ltdc2010  axx,614  aMechanical Engg(621.8)  aMotamedi, Manouchehr E.  c197396d197396  001040708MCAaAIMITbAIMITeKnowledge Worldg795.00l0o620.106 MOTMpMCA16929r2025-07-21 00:00:00v596.25w2021-07-16yBK