00489nam a2200157Ia 4500008004100000020001800041041000800059082001700067100002800084245009600112250000600208260005100214300001100265650002700276700002800303210716s2010    xx            000 0 und d  a9788122428339  aeng  a620.106 MOTM  aMotamedi, Manouchehr E.  aMOEMS: micro- opto- electro- mechanical systems.bMicro- opto- electro- mechanical systems.  a1  aNew DelhibNew Age International Pvt Ltdc2010  axx,614  aMechanical Engg(621.8)  aMotamedi, Manouchehr E.