Motamedi, Manouchehr E. <br/><br/>
MOEMS: micro- opto- electro- mechanical systems.  Micro- opto- electro- mechanical systems. 

 - 1 
 - New Delhi  New Age International Pvt Ltd  2010 
 - xx,614 
<br/><br/><label>ISBN: </label>9788122428339 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechanical Engg(621.8)
<br/><br/><label>Dewey Class. No.: </label>620.106 MOTM