TY  - BOOK
AU  - Hsu, Tai Ram.
TI  - Mems and microsystems: design and manufacture: Design and manufacture
SN  - 007048709X
U1  - 621.381 HSUT 
PY  - 2002///
CY  - New Delhi
PB  - Tata McGraw Hill Publishing Company Ltd
KW  - Digital Systems
ER  -