00420nam a2200145Ia 4500008004100000020001500041041000800056082001700064100001800081245007600099250000600175260006100181300001200242650002000254210716s2002    xx            000 0 und d  a007048709X  aeng  a621.381 HSUT  aHsu, Tai Ram.  aMems and microsystems: design and manufacture.bDesign and manufacture.  a1  aNew DelhibTata McGraw Hill Publishing Company Ltdc2002  axii,436  aDigital Systems