TY  - BOOK
AU  - HOFFMAN (Dorothy M);SINGH (Bawa);THIRD (John H Thomas)
TI  - Handbook of vacuum science and technology
SN  - 978-81-8147-985-3
U1  - 621.55  23
PY  - 2005///
CY  - USA
PB  - Academic Press
KW  - Applied Physics
ER  -