00491nam a2200193Ia 4500003000400000005001700004008004100021020002200062040000700084041000800091082002400099100002000123245006700143250000600210260003600216300001600252365001700268650001200285OSt20230426143446.0210423s2012    xx            000 0 und d  a978-0-12-524975-1  cAL  aeng  a530.4275 223bOHRM  aOHRING (Milton)  aMaterials science of thin films: deposition and structure Ed 2  a2  aSan DiegobAcademic Pressc2012  axxi,794bHB  b10906.2cUSD  aPhysics