00494nam a2200193Ia 4500003000400000005001700004008004100021020002200062040000700084041000800091082001800099100002000117245006700137260003000204300001600234365001300250650002500263650001200288OSt20230623151301.0210423s2014 xx 000 0 und d a978-0-12-524975-1 cAL aeng a530.4275 OHRM aOHRING (Milton) aMaterials science of thin films: deposition and structure Ed 2 aNew DelhibElsevierc2014 axxi,794bPB b795cINR aLiquid State Physics aPhysics