00490nam a2200193Ia 4500003000400000005001700004008004100021020001800062040000700080041000800087082002200095100002100117245006300138250000600201260003600207300001600243365001300259650002400272OSt20230508150529.0210423s2010    xx            000 0 und d  a9788131202791  cAL  aeng  a530.4275 OHRM223  aOHRING (Milton).  aMaterials science of thin films: deposition and structure.  a2  aNew DelhibAcademic Pressc2010  axxi,794bHB  b795cINR  aSolid State Physics